Silicon Rings and Showerheads for oxide etchers
Boston Electronics is a seller of wafer quality fabricated silicon, which is used primarily in the semiconductor wafer manufacturing industry. These fabricated silicon parts include showerhead electrodes and rings, which are used in oxide etching machinery.
We currently sell these products for use in TEL (Tokyo Electron Limited), LAM Research Corporation
and Applied Materials, Inc. oxide and plasma etching machinery to companies overseas and in the United States.
We can reverse-engineer parts from customer-supplied samples or fabricate to
customer drawing.
We also sell silicon blanks (un-fabricated), with diameters up to 400mm, resistivity
0.005 to 80 ohm-cm, 1-0-0 orientation, p-type.
Questions? Comments? Suggestions? Send email to the Webmaster at
Boston Electronics.
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